| 摘要 |
PROBLEM TO BE SOLVED: To improve cooling efficiency, by suppressing contacting of cold air with the wall surfaces of a treatment tank during cold-air cooling, even if the wall surface temperature of the treatment tank rises due to vacuum cooling, in a cooling apparatus capable of carrying out vacuum cooling and cold air cooling. SOLUTION: The treatment tank 2 is vertically partitioned into a first area 12 and a second area 13 via a bulkhead 11. The regions 12, 13 are mutually communicated via openings 17, 18 arranged horizontally in the bulkhead 11. Hollow duct walls 19, 20 are provided on the upper parts of the openings 17, 18 separated from the left and the right wall surfaces of the treatment tank 2. The interior of the treatment tank 2 is decompressed by using a decompressing means 3; and after vacuum cooling of an object 1 to be cooled is carried out, and a fan 6 and a cooler 7 are operated to carry out cold air cooling. During cold air cooling, cold air from the fan 6 via the cooler 7 is supplied to the object 1 to be cooled from the right side wall 20 and is returned to the second region 13 from the left-side duct wall 19. COPYRIGHT: (C)2008,JPO&INPIT
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