| 摘要 |
PROBLEM TO BE SOLVED: To solve the nonconformities of a conventional frequency regulation apparatus, such as deterioration in the frequency regulation accuracy due to the vibration of a tray and a mask, deterioration in frequency regulation accuracy caused by long distance between an ion gun and a piezoelectric resonance element, and complex works of alignment between a product holding tray and a frequency regulating mask. SOLUTION: A tray 1 for frequency regulation comprises a holding concave section 2 and a beam incidence hole 3. The concave section 2 accommodates an insulated container 20 within an aperture, arranged at one surface, in a state where the aperture has been placed upside down. Wherein, the insulated container 20 holds a piezoelectric resonance element 25. The beam incidence hole penetrates the bottom of the concave section, and comprises a lower concave section 4 of small diameter formed at the bottom of the concave section in a shape of steps and a hole 6 for beam incidence of smaller diameter formed at a thin bottom 5 of the lower concave section 4. COPYRIGHT: (C)2008,JPO&INPIT
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