| 发明名称 |
Modulated optical reflectance measurement system with enhanced sensitivity |
| 摘要 |
A modulated optical reflectance (MOR) measurement system is disclosed which uses an infrared probe beam. Preferably the probe beam has a wavelength of at least 800 nm and preferable greater than one micron (1000 nm).
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| 申请公布号 |
US2008074668(A1) |
申请公布日期 |
2008.03.27 |
| 申请号 |
US20070899105 |
申请日期 |
2007.09.04 |
| 申请人 |
SALNIK ALEX;NICOLAIDES LENA;OPSAL JON |
发明人 |
SALNIK ALEX;NICOLAIDES LENA;OPSAL JON |
| 分类号 |
G01N21/63 |
主分类号 |
G01N21/63 |
| 代理机构 |
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