| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity sensor for possibly reducing a detection error dependent on a temperature due to a mechanical stress generated from a difference between thermal expansion coefficients of components. <P>SOLUTION: The physical quantity sensor includes: a sensing element 1 having a mass 10 displaced in response to the physical quantity to be detected; a circuit element 4 attached to the sensing element 1; and an exterior case 7 for accommodating and mounting the sensing element 1 and the circuit element 4. The circuit element 4 is supported by the exterior case 7 through beam members 61a, 61b, 61c, 61d as plate springs having the elasticity. <P>COPYRIGHT: (C)2008,JPO&INPIT |
