| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a workpiece processor for accurately judging whether the whole area of a workpiece is reformed effectively. <P>SOLUTION: Nozzles 101a-101h provided on a dispenser drop water droplets down to each plasma-treated workpiece W. Contact angle meters 102a-102h detect contact angles of water droplets fallen from the nozzles 101a-101h. When the contact angles detected by the contact angle meters 102a-102h are equal to or greater than preset values, a judging section 942 judges that the wettability of the workpiece has not been improved and that stain and dust have not been fully removed from the workpiece by plasma treatment. <P>COPYRIGHT: (C)2008,JPO&INPIT |
