| 摘要 |
PROBLEM TO BE SOLVED: To calibrate a loop gain without stopping disturbance suppression control, in a position control device with a disturbance suppression function. SOLUTION: For the purpose of the disturbance suppression control, this position control device has: a feedback controller 20 wherein a loop characteristic changes; a table 32 storing a target gain according to a disturbance frequency; and a gain calibration part 34 calibrating the open loop gain. The gain is calibrated by use of the target gain of the table according to the change of the loop characteristic of the feedback controller. The open loop gain can be calibrated without suspending the disturbance suppression control, and the open loop gain can be accurately calibrated without being affected by disturbance, so that accurate position control can be performed. COPYRIGHT: (C)2008,JPO&INPIT
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