| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator, an optical scanner and an image formation device capable of detecting behavior of a mass part in high precision without being influenced by a temperature change while reducing cost. SOLUTION: This actuator 1 is constituted to turn the first mass parts 21, 22 while torsionally deforming first elastic parts 26, 27 by actuation of piezoelectric elements 31 to 34 and to turn the second mass part 25 while torsionally deforming second elastic parts 28, 29 accordingly. A behavior detection means to detect the behavior of the second mass part 25 is furnished with a vibration detection element 8 to detect vibration of gas in the circumference of the second mass part 25 in accordance with turn of the second mass part 25 and is constituted so as to detect the behavior (frequency) of the second mass part 25 in accordance with a detection result of the vibration detection element 8. COPYRIGHT: (C)2008,JPO&INPIT
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