发明名称 SEMICONDUCTOR APPARATUS AND METHOD OF MANUFACTURING THE SAME
摘要 It is an object of the present invention to provide a technology of controlling a threshold voltage of a thin film transistor in which an amorphous oxide film is applied to a channel layer. There is provided a semiconductor apparatus including a plurality of kinds of transistors, each of the plurality of kinds of transistors including a channel layer made of an amorphous oxide containing a plurality of kinds of metal elements; and threshold voltages of the plurality of kinds of transistors are different from one another by changing an element ratio of the amorphous oxide.
申请公布号 US2008073653(A1) 申请公布日期 2008.03.27
申请号 US20070859641 申请日期 2007.09.21
申请人 CANON KABUSHIKI KAISHA 发明人 IWASAKI TATSUYA
分类号 H01L27/15;H01L21/16;H01L29/00 主分类号 H01L27/15
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