MULTI-RANGE ACCELERATION SENSOR,申请号JP20060251006-传众专利搜索

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发明名称	MULTI-RANGE ACCELERATION SENSOR
摘要	<P>PROBLEM TO BE SOLVED: To manufacture a plurality of three-axis acceleration sensors of significantly different measurement ranges in small area at low cost, and to accurately align the directions of the acceleration detection axes of the plurality of sensors. <P>SOLUTION: A first three-axis acceleration sensor element comprises a frame section, a weight section held in the frame section via a flexible section, and a semiconductor piezo resistance element disposed in the flexible section. In the frame section of the first three-axis acceleration sensor element, a second three-axis acceleration sensor element having an output voltage per unit acceleration smaller than that of the first three-axis acceleration sensor element is formed. The miniaturization is allowed by sharing the frame section, the manufacturing cost is low because collective formation on one chip is allowed by a process of photolithography, etching or the like, and the acceleration detection axes of the plurality of sensor elements are aligned at a high photolithography mask accuracy. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号	JP2008070312(A)	申请公布日期	2008.03.27
申请号	JP20060251006	申请日期	2006.09.15
申请人	HITACHI METALS LTD	发明人	KAZAMA ATSUSHI;OKADA RYOJI;SAITO MASAKATSU;SUGIMOTO MASAKAZU
分类号	G01P15/08;G01P15/12;G01P15/18;H01L29/84	主分类号	G01P15/08
代理机构		代理人
主权项
地址

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