发明名称 METHOD OF ESTIMATING FAILURE STEP, DEVICE OF ESTIMATING FAILURE STEP, PROGRAM, AND RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To improve the performance of failure step estimation concerning a plurality of manufacturing steps to be conducted for manufactured products in sequence. SOLUTION: Based on the magnitude correlation between a quality value indicating some quality of a product and a predetermined reference value, the classification result showing nondefective product or defective product concerning each of products is output (110). According to the classification result, a manufacturing step that is estimated as a factor causing the defective product is estimated among a plurality of manufacturing steps, and it is output as a factor candidate, and the reliability showing the possibility of the factor candidate as the nondefective product causing factor is output as the reliability of factor candidate (120). The reference is adjusted so as to improve the reliability of factor candidate (130). The adjusted reference value instead of the predetermined reference value is used to conduct the classification and the estimation, and the manufacturing step that causes the defective product is estimated and the estimated result is output (140). COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008071790(A) 申请公布日期 2008.03.27
申请号 JP20060246565 申请日期 2006.09.12
申请人 SHARP CORP 发明人 YAMADA EIJI
分类号 H01L21/66 主分类号 H01L21/66
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