发明名称 |
PIEZOELECTRIC THIN FILM DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
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申请公布号 |
US2008072408(A1) |
申请公布日期 |
2008.03.27 |
申请号 |
US20070946910 |
申请日期 |
2007.11.29 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
SANO KENYA;OHARA RYOICHI;YANASE NAOKO;YASUMOTO TAKAAKI;ITAYA KAZUHIKO;KAWAKUBO TAKASHI;TOYODA HIROSHI;HASUNUMA MASAHIKO;NAGANO TOSHIHIKO;ABE KAZUHIDE;NISHIGAKI MICHIHIKO;SHIBATA HIRONOBU |
分类号 |
H01L41/22;H01L41/047;H03H3/02;H03H9/02;H03H9/15;H03H9/17;H04R31/00;H05K3/10 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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地址 |
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