INERTIA FORCE SENSOR

摘要

A detection element (1) detects an angular velocity by using,: a first sum value obtained by adding output values outputted from an upper electrode of a second detection electrode unit (19b) and an upper electrode of a fourth detection electrode unit (20b) which serve as positive electrodes to each other upon generation of an angular velocity; a second sum value obtained by adding output values outputted from an upper electrode of a first detection electrode unit (19a) and an upper electrode of a third detection electrode unit (20a) which serve as negative electrodes to each other; a third sum value obtained by adding output values outputted from a lower electrode of the first detection electrode unit (19a) and a lower electrode of the third detection electrode unit (20a) which serve as positive electrodes to each other; a fourth sum value obtained by adding output values outputted from a lower electrode of the second detection electrode unit (19b) and an lower electrode of the fourth detection electrode unit (20b) which serve as negative electrodes to each other, upon generation of an angular velocity.