发明名称 METHOD FOR MANUFACTURING TRANSPARENT CURED FILM USING POSITIVE-WORKING PHOTOSENSITIVE RESIN LAYER FOR HALF EXPOSURE
摘要 <p>[PROBLEMS] To provide a method for manufacturing a transparent cured film having a wide exposure margin while maintaining a high level of sensitivity, especially a method for manufacturing a transparent cured film, which can be applied to the manufacture of a TFT flattening film in a semitransmission liquid crystal display element, and is used particularly for simultaneously forming contact holes and reflection concavoconvexes by half exposure. [MEANS FOR SOLVING PROBLEMS] A method for manufacturing a transparent cured film, characterized by comprising stacking two positive-working photosensitive resin layers different from each other in exposure sensitivity on a base material so that the lower-sensitivity positive-working photosensitive resin layer is located between the base material and the higher-sensitivity positive-working photosensitive resin layer, exposing the positive-working resin layers to light, heating the exposed positive-working resin layers, developing the assembly, and post-baking the assembly. A display element comprising a transparent cured film produced by the above method.</p>
申请公布号 WO2008035672(A1) 申请公布日期 2008.03.27
申请号 WO2007JP68083 申请日期 2007.09.18
申请人 NISSAN CHEMICAL INDUSTRIES, LTD.;HATANAKA, TADASHI 发明人 HATANAKA, TADASHI
分类号 G03F7/004;G03F7/26;G03F7/039;H01L21/027 主分类号 G03F7/004
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