| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus and a method of irradiation with light, by which apparatus and method, an amount of the irradiation can be measured, and the apparatus can be small-sized. <P>SOLUTION: The present invention is related to an ultraviolet irradiation apparatus 1 for irradiating the surfaces of substrates 7 to 10 with an ultraviolet ray. The ultraviolet irradiation apparatus 1 comprises: a light emitting section 17 for emitting the ultraviolet ray; a UV light source control section 18 for controlling the intensity of the ultraviolet ray to be emitted from the light emitting apparatus 17; a table 4 for mounting the substrates 7 to 10; and an irradiation measuring section 19 for measuring the irradiation amount of the ultraviolet ray. The irradiation measuring section 19 has light receiving sections 11 to 14. The light receiving sections 11 to 14 are arranged in the positions on the table 4, where the ultraviolet ray is interrupted by the substrates 7 to 10. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
