| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a chucking member which chucks a substrate. <P>SOLUTION: This chucking member is provided with a chuck pin which chucks the side of the substrate, and is decentered from the center of rotation. The chuck pin formed in a streamline shape includes a first front end located at the front end, and a first back end located at the back end to the flow of air stream generated by the rotation of the substrate. The first front end is provided with a first tip portion, and the first back end has a round shape. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
