| 摘要 |
PROBLEM TO BE SOLVED: To provide a motor for a vacuum which can stably lower gas discharge speed, by suppressing gas discharge from coil mold resin, and will not make treatment liquid remain at film formation, and will not contaminate the vacuum environment. SOLUTION: A coil 6 fixed to a frame 1 is resin-molded to each single coil of each phase, the surface of a mold resin 7 of each single coil is coated with a metal film 8, and each single coil is fixed to the frame. The molded single coil is fixed to the frame by a fixing member 9, comprising a low water absorption resin whose water absorption rate is not higher than 0.1%, such as a polyphenylene-sulfide resin and polyamide, and a coil bobbin. The metal film is formed by plating. COPYRIGHT: (C)2008,JPO&INPIT
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