摘要 |
The invention relates to an optical element (1) for at least partial, localised correction of a wavefront error of an optical system irradiated by an optical beam, comprising a region optically active with regard to the optical beam and electrical conductor tracks (3) in said optically active region, said electrical conductor tracks having, at least partly, a diameter of at most 50 micrometres lateral to the direction of incidence of the optical beam. |
申请人 |
CARL ZEISS SMT AG;EVA, ERIC;TAYEBATI, PAYAM;THIER, MICHAEL;HAUF, MARKUS;SCHOENHOFF, ULRICH;FLUEGGE, OLE;KAZI, ARIF;SAUERHOEFER, ALEXANDER;FOCHT, GERHARD;WEBER, JOCHEN;GRUNER, TORALF |
发明人 |
EVA, ERIC;TAYEBATI, PAYAM;THIER, MICHAEL;HAUF, MARKUS;SCHOENHOFF, ULRICH;FLUEGGE, OLE;KAZI, ARIF;SAUERHOEFER, ALEXANDER;FOCHT, GERHARD;WEBER, JOCHEN;GRUNER, TORALF |