发明名称 A NANOPOSITIONER FOR MOVING AN OBJECT IN NANOMETER RESOLUTION AND METHOD THEREOF
摘要 The present invention relates to a flexural nanopositioning technology with nanometer resolution two bar mechanism design. The present invention in particular relates to a nanopositioner for moving an object in nanometer resolution in desired direction without any parasitic displacement with translational movement and method thereof.
申请公布号 WO2008015702(A3) 申请公布日期 2008.03.27
申请号 WO2007IN00313 申请日期 2007.07.31
申请人 ALAM, HILAAL 发明人 ALAM, HILAAL
分类号 B23Q1/34;H01L41/09 主分类号 B23Q1/34
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