| 摘要 |
There is disclosed a method of producing a diamond film formed on a substrate, wherein at least after a film (dopant layer) containing doping elements is formed on a surface of the substrate, a vapor phase synthetic diamond film is formed on the dopant layer, and the dopant layer contains diamond particles, which become sources of diamond nuclei, in addition to doping elements, and also disclosed a diamond film produced by the method. There can be provided a method of producing a diamond film that a diamond film having lowered electric resistance can be produced, and also provided a diamond film produced by the method. |
