发明名称 |
Shape measurement method and shape measurement apparatus |
摘要 |
<p>A shape measurement method for measuring a shape of an object to be measured, which has a substantially rotating symmetric shape, includes: placing an aperture having an opening larger than an outer shape of the object to be measured and the object to be measured on an optical axis; taking an image generated by light projected to the object to be measured, by using an image pickup unit; and calculating one cross-sectional shape of the object to be measured based on a light intensity distribution of the image taken by the image pickup unit.</p> |
申请公布号 |
EP1903300(A1) |
申请公布日期 |
2008.03.26 |
申请号 |
EP20070018494 |
申请日期 |
2007.09.20 |
申请人 |
MITUTOYO CORPORATION |
发明人 |
HARA, SOTOMITSU;TSUCHIDA, YUTAKA;ARAI, YOSHIKAZU;ISHII, YASUSHI;ABE, MAKOTO;UESHIMA, YASUSHI |
分类号 |
G01B11/24 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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