发明名称 SILVER ALLOY SPUTTERING TARGET FOR FORMING REFLECTIVE LAYER OF OPTICAL RECORDING MEDIUM
摘要 A silver alloy sputtering target for forming Ag alloy reflective layer of optical recording media such as magneto-optical recording disks (MD, MO) and optical recording disks (CD-RW, DVD-RAM) is provided. The sputtering target is made of (1) a silver alloy having a composition of 0.5 to 3% by mass of Cu and 0.1 to 3% by mass in total of one or more elements selected from among Dy, La, Nd, Tb and Gd, with the remainder consisting of Ag; (2) a silver alloy having a composition of 0.5 to 3% by mass of Cu and 0.005 to 0.05% by mass in total of one or more elements selected from among Ca, Be and Si, with the remainder consisting of Ag; or (3) a silver alloy having composition of 0.5 to 3% by mass of Cu, 0.1 to 3% by mass in total of one or more elements selected from among Dy, La, Nd, Tb and Gd and 0.005 to 0.05% by mass in total of one or more elements selected from among Ca, Be and Si, with the remainder consisting of Ag.
申请公布号 EP1603129(A4) 申请公布日期 2008.03.26
申请号 EP20030712681 申请日期 2003.03.13
申请人 MITSUBISHI MATERIALS CORPORATION 发明人 MISHIMA, AKIFUMI
分类号 C23C14/34;G11B7/258;G11B7/26;(IPC1-7):G11B7/26;G11B7/24 主分类号 C23C14/34
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