METHOD FOR MANUFACTURING THIN FILM TRANSISTOR ARRAY PANEL

摘要

A method for manufacturing a thin film transistor array panel is provided to improve characteristics of an organic thin film transistor by reorienting organic semiconductor molecules of organic semiconductors through re-melting and drying steps. A gate electrode(124) is formed on a substrate, and then a source electrode(193) isolated from the gate electrode and a drain electrode(195) opposite to the source electrode are formed. After an organic semiconductor(154) comes in contact with the source and drain electrodes, a solvent is sprayed onto the organic semiconductor, and then the solvent is dried. The organic semiconductor is annealed. The solvent includes at least one of tetralin, cyclohexane, benzene, xylene, anisole, Benzo nitrile, lutidine, morpholine, aniline, toluene, pyridine, dioxane, and derivatives thereof.