发明名称 Substrate holder assembly device
摘要 A device for mounting and removing a substrate from a baseplate, in particular a substrate holder assembly device, including automated features for latching and unlatching a substrate, for use in a coating mechanism, from a baseplate, which includes an adjustable snap ring holder.
申请公布号 EP1903603(A2) 申请公布日期 2008.03.26
申请号 EP20070253619 申请日期 2007.09.12
申请人 JDS UNIPHASE CORPORATION 发明人 SEDDON, RICHARD I.;BARBARIA, RUSSELL EDWARD;ERZ, RALF;TILSCH, MARKUS K.
分类号 H01L21/687 主分类号 H01L21/687
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