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发明名称
Method of manufacturing buried regions
摘要
申请公布号
EP1258920(B1)
申请公布日期
2008.03.26
申请号
EP20020010016
申请日期
2002.05.04
申请人
ATMEL GERMANY GMBH
发明人
DIETRICH, HARRY;DUDEK, VOLKER, DR.;SCHUEPPEN, ANDREAS, DR.
分类号
H01L21/20;H01L21/762;H01L21/74
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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