INTERLOCK SYSTEM OF SEMICONDUCTOR PROCESSING EQUIPMENT

摘要

An interlock system of a semiconductor processing apparatus is provided to detect rapidly causes of an accident by monitoring input and output voltages of each of units in real time. A semiconductor processing apparatus(110) includes a plurality of power supply units. A real-time power monitoring unit(120) monitors input and output voltages of the power supply units in real time and outputs an abnormal state signal according to a monitored result. An interlock signal generation unit(140) generates an interlock signal in response to the abnormal state signal. A control unit(150) outputs a control signal in response to the interlock signal to control the semiconductor processing apparatus. A display unit(160) displays the input and output voltages of the power supply units received from the real-time power monitoring unit.