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发明名称
PERMANENT RESIST COMPOSITION, CURED PRODUCT THEREOF, AND USE THEREOF
摘要
申请公布号
EP1730592(A4)
申请公布日期
2008.03.26
申请号
EP20050713440
申请日期
2005.02.10
申请人
MICROCHEM CORP.;NIPPON KAYAKU CO., LTD.
发明人
WEBER, WILLIAM;MORI, SATOSHI;HONDA, NAO;JOHNSON, DONALD;DOCANTO, MANUEL
分类号
G03F7/038;C08G59/32;C08G59/68;G03C1/492;G03F7/00
主分类号
G03F7/038
代理机构
代理人
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