Method of manufacturing group III nitride substrate,申请号EP20040250264-传众专利搜索

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发明名称	Method of manufacturing group III nitride substrate
摘要
申请公布号	EP1439572(A3)	申请公布日期	2008.03.26
申请号	EP20040250264	申请日期	2004.01.20
申请人	MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD	发明人	KITAOKA, YASUO;KIDOGUCHI, ISAO;MINEMOTO,HISASHI;ISHIBASHI, AKIHIKO
分类号	H01L21/20;C30B9/00;C30B25/02;C30B29/40;H01L21/203;H01L21/208;H01L21/78;H01L33/00	主分类号	H01L21/20
代理机构		代理人
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