| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an electrostatic chuck which exhibits a superior withstand voltage characteristic even when an upper insulating layer has a thin thickness. SOLUTION: The electrostatic chuck manufactured by this method is provided with a base 1, a lower insulating layer 2 formed on the upper surface of the base 1, and an electrode layer 3 formed on the layer 2. The chuck is also provided with the upper insulating layer 4 formed on the lower insulating layer 2 to cover the electrode layer 3. This method includes a first step of thermal spraying a material which becomes the lower insulating layer 2 to the upper surface of the base 1, a second step of thermal spraying a material which becomes the electrode layer 3 to an area surrounded by a masking tape 5 on the insulating layer 2 formed in the first step, and a third step of removing the masking tape 5 and polishing the edge of the electrode layer 3 formed in the second step to a tapered state. This method also includes a fourth step of thermal spraying a material which becomes the upper insulating layer 4 to the lower insulating layer 2 so as to cover the electrode layer 3 after the third step is finished. COPYRIGHT: (C)2004,JPO |
