| 摘要 |
A stage unit which can be divided and transported by land and can ensure proper processing of a substrate to be processed. The stage unit (11) comprises a pair of guide frames (13X1, 13X2) arranged oppositely across the supporting surface on which the substrate to be processed is arranged, and a gantry (13Y) supported movably on the upper surface of the pair of guide frames (13X1, 13X2). The stage unit (11) is constituted of a body coupling a first structure (V1) including one guide frame (13X1), a second structure (V2) including the other guide frame (13X2), and a third structure (V3) including the gantry (13Y). Since each structure (V1-V3) is separable, even a large stage unit can be transported by land, and since no joint exist on the path of movement of the gantry (13Y), correct processing of a substrate can be ensured with no compromise in the precision of feeding the gantry (13Y). ® KIPO & WIPO 2008
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