发明名称 Ceramic substrate for thin-film electronic components, method for producing the substrate, and thin-film electronic component employing the substrate
摘要 A first ceramic substrate includes a substrate ( 2 ) and a glaze layer ( 3 ), wherein the glaze layer has a surface having an Ra of 0.02 mum or less and a Ry of 0.25 mum or less. A second ceramic substrate is formed by subjecting a glass layer ( 24 ) formed on a surface of a substrate ( 2 ) to heating-and-pressurizing treatment, thereby forming a glaze layer ( 3 ) on the substrate ( 2 ), and planarization-polishing the surface of the glaze layer. A third ceramic substrate includes a substrate ( 2 ), a glaze layer ( 3 ) containing substantially no pores formed on the substrate ( 2 ) and the surface thereof being planarization-polished, and a wiring pattern ( 21 ), wherein at least one first end of the wiring pattern is exposed to the glaze layer ( 3 ) surface of the substrate ( 1 ), and at least one second end is exposed to another surface of the substrate ( 1 ).
申请公布号 US7348069(B2) 申请公布日期 2008.03.25
申请号 US20040951731 申请日期 2004.09.29
申请人 NGK SPARK PLUG CO., LTD. 发明人 ICHIYANAGI SEIJI;OTSUKA JUN;SATO MANABU;OKUYAMA MASAHIKO
分类号 C03C27/02;H01L27/04;B32B3/00;C04B41/85;G03C5/00;H01G2/06;H01G4/06;H01G4/30;H01G4/33;H01L23/15;H01L23/498;H01L27/01;H01L29/786;H05K1/03;H05K1/16 主分类号 C03C27/02
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