发明名称 Post bump passivation for soft error protection
摘要 A structure and a method for forming the same. The method includes (a) providing a structure which includes (i) a dielectric layer, (ii) an electrically conducting bond pad on and in direct physical contact with the dielectric layer top surface, (iii) a first passivation layer on the dielectric layer top surface and on the electrically conducting bond pad, wherein the first passivation layer comprises a first hole directly above the electrically conducting bond pad, and (iv) an electrically conducting solder bump filling the first hole and electrically coupled to the electrically conducting bond pad; and (b) forming a second passivation layer on the first passivation layer, wherein second passivation layer is in direct physical contact with the electrically conducting solder bump, and wherein the electrically conducting solder bump is exposed to a surrounding ambient immediately after said forming the second passivation layer is performed.
申请公布号 US7348210(B2) 申请公布日期 2008.03.25
申请号 US20050908084 申请日期 2005.04.27
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DAUBENSPECK TIMOTHY H.;GAMBINO JEFFREY PETER;MUZZY CHRISTOPHER DAVID;SAUTER WOLFGANG;SPROGIS EDMUND JURIS
分类号 H01L21/00 主分类号 H01L21/00
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