摘要 |
A method for preparing a methyl chlorosilane is provided to secure constant high reactivity and high selectivity of the methyl chlorosilane synthesis by removing a very small amount of oxygen. A method for preparing a methyl chlorosilane comprises a step of reacting a contact composition including Si and a Cu catalyst with chloromethane continuously, wherein a concentration of oxygen in the chloromethane is decreased by mixing chloromethane containing oxygen with chloromethane containing a gaseous boron compound in a mixing ratio of 20:80-80:20. Further, a concentration of the gaseous boron compound is at least 50 vol.ppm.
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