METHOD AND APPARATUS FOR MANUFACTURING TUBE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a crystalline tube from a material such as silicon by pulling up the tube from a melt of the material.

SOLUTION: The melt produced by melting the material supplied into a crucible 16 with heating elements 22, 24 passes through a capillary gap defining a tube shape and forming a meniscus while solidifying the upper end region thereof by pulling it with a pulling means 48 in a direction indicated by the arrowhead 50 so that a polygonal tube is produced. Every side of the polygon is allocated to one region of the melt. The temperature of the every side is separately controlled.

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