| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate feeder which can cope with diversified specifications flexibly by a simple constitution. SOLUTION: The substrate feeder 6 comprises a substrate feeding reel 10A around which a substrate 2A and a spacer 9 fed to a resin coater 4 are wound while being overlapped, a reel 12A for taking up the spacer 9 separated from the substrate 2A, a housing 18 for containing the substrate feeding reel 10A and the spacer take-up reel 12A, a first fixing panel 19A arranged to partition the interior of the housing 18 in the front and back direction, and a substrate feeding component such as a substrate guide roller 13A fixed to the first fixing panel 19A. In the substrate feeder 6, the first fixing panel 19A is constituted of first through fifth split panels 191A-195A. COPYRIGHT: (C)2008,JPO&INPIT
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