SUBSTRATE TRANSFER APPARATUS, EXPOSURE APPARATUS, COATER-DEVELOPER, EXPOSURE SYSTEM, AND SUBSTRATE TRANSFER METHOD, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To prevent a drop in productivity with the transfer of a substrate. SOLUTION: The substrate transfer apparatus supplies substrates to a processing portion EX-SYS while at the same time collecting the substrates from the processing portion EX-SYS. The substrate transfer apparatus gives priority to a substrate supply process based on information about substrate supply and collection information. COPYRIGHT: (C)2008,JPO&INPIT