| 摘要 |
PROBLEM TO BE SOLVED: To adjust a pushing force having high accuracy in a short time in a laminating device. SOLUTION: The laminating device 1 has a base-side device 2 placing a chip 21 and a pushing-side device 6 holding a substrate 60 bonding the chip 21. The substrate 60 is pushed against the chip 21 by a specified pushing force by a part of a load of the pushing-side device 6 by lifting the pushing-side device 6 against the load of the pushing-side device 6 by an air cylinder 7. A spring type bar tension gauge 81 lifting the pushing-side device 6 by sharing with the air cylinder is moved in the vertical direction by a knob 82 and a lifting force is adjusted. COPYRIGHT: (C)2008,JPO&INPIT
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