| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum suction apparatus capable of certainly detecting whether a substrate is suctioned by vacuum or not in short time. <P>SOLUTION: When partially having a portion which is not suctioned by vacuum, a substrate W is somewhat off from the upper surface of a substrate installation table 5 at this portion. When the substrate W is off therefrom, pressure detected in a vacuum detection hole 8 which opens at this portion or a portion which is individually adjacent to this portion becomes high because of the entrance of air from the outside. Thus, determination that the substrate W is certainly suctioned to the upper surface of the substrate installation table 5 can be made when all of a plurality of pressure sensors 11 provided sense vacuum. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
