| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing method and a polisher, which easily determine an eccentric amount, an oscillating angle, and an oscillating position, while they need long experience, improve reproducibility accuracy of polishing, and easily sustain high-accuracy surface polishing. <P>SOLUTION: In an Oscar type polisher, a pressurizing pressure is applied to a lower polishing plate 3 driven in rotation by a rotary driving motor by an air cylinder 11 provided with an upper surface plate 7 to which a workpiece is stuck at one end part of an oscillating arm 12, and the workpiece is polished while polishing liquid is supplied thereto. The oscillating arm 12 is provided with an oscillating driving motor 34 for adjusting a predetermined polishing position of the upper polishing plate 7 to the lower polishing surface plate 3, and the polisher includes: a polishing pattern data storage part for previously recording measured values as a driving power value of the oscillating driving motor 34 based on the pressurizing pressure of the air cylinder 11 in the polishing position; and a control device for controlling the oscillating driving motor 34 to reproduce the driving power value by controlling the pressurizing pressure of the air cylinder 11 in polishing. <P>COPYRIGHT: (C)2008,JPO&INPIT |
