| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning method of a substrate which enables accurate positioning. <P>SOLUTION: The positioning method of the substrate has a first measuring process for measuring the position of an alignment mark of a printing plate, a second measuring process for measuring the position of the alignment mark of the substrate, a transfer process for transferring a pattern of the alignment mark onto the surface of the substrate, a third measuring process for measuring the position of the transferred pattern of the alignment, a first positioning process for moving a table so that the position of the alignment mark measured in the second measuring process and the position of the pattern measured in the third measuring process may coincide with each other, a post-plate-replacement measuring process for measuring the position of the alignment mark of a printing plate to be used subsequently for transfer of the pattern, and a post-plate-replacement positioning process for moving the table on the basis of the position of the alignment mark measured in the first measuring process and the position of the alignment mark measured in the post-plate-replacement measuring process. <P>COPYRIGHT: (C)2008,JPO&INPIT |
