| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus and a laser beam machining method capable of excellently machining a workpiece with a simple configuration. <P>SOLUTION: When machining the workpiece W by irradiating the surface of the workpiece with laser beams L, the laser beams are scanned in the direction orthogonal to the optical axis while periodically moving the focal position of the laser beams L in the optical axis direction. Even when small unevenness is present on the surface of the workpiece W, the focal position can be periodically focused on the surface to prevent occurrence of a case in which a machining mark is not partially formed, and excellent machining cannot be performed. Thus, the workpiece W can be excellently machined by a simple constitution in which a constitution of also periodically moving the focal position to the optical axis direction is added to a conventional constitution in which the laser beams L are scanned in the direction orthogonal to the optical axis. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
