发明名称 SEMICONDUCTOR TEST DEVICE AND SEMICONDUCTOR TEST METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor test device and semiconductor test a method capable of simultaneously and correctly inspecting a plurality of wafer dies. SOLUTION: A communication signal conversion circuit for signal processing between each test device and a test board is provided, whereby a plurality of wafer dies can be simultaneously and correctly inspected. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008066604(A) 申请公布日期 2008.03.21
申请号 JP20060244779 申请日期 2006.09.08
申请人 RICOH CO LTD 发明人 HORII TOSHIO
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
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