| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron gun for vapor deposition coping with different needs by changing only specified components while using the main body part of a single electron gun. SOLUTION: Both an upper cover 13 using the main body part 10 of the single electron gun and comprising circuit forming members 15a, 15b constituted of a magnetic body forming a magnetic circuit with upright pole pieces 11a, 11b constituted of a magnetic body fixed thereto and a non-magnetic body, and an upper cover 24 comprising circuit forming members 22a, 22b constituted of a magnetic body forming a magnetic circuit with transverse pole pieces 21a, 21b constituted of a magnetic body and beam track adjusting members 23a, 23b constituted of a magnetic body for finely adjusting the track of electron beams emitted from the inside of the body part 10 fixed thereto and a non-magnetic body are attachable to the upper portion of the main body part 10. COPYRIGHT: (C)2008,JPO&INPIT
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