| 摘要 |
An apparatus and a method for cleaning a large area substrate are provided to enhance the degree of integration by enhancing the uniformity of thickness of coated cleaning water. An apparatus for cleaning a large area substrate(10) includes a puddle knife(30) and an air curtain unit(40). The puddle knife sprays cleaning water on the large area substrate. The air curtain unit, which includes an air curtain nozzle unit(41) and a regulator(42), adjusts the thickness of the cleaning water remaining on the large area substrate by spraying air curtains corresponding to profile of the sprayed cleaning water. The air curtain nozzle unit sprays air on the large area substrate. The regulator adjusts the pressure of air to be sprayed air having higher pressure in a rear stage than a front stage.
|
