| 摘要 |
<P>PROBLEM TO BE SOLVED: To miniaturize an acceleration sensor, and achieve a triaxial acceleration detection. <P>SOLUTION: First and second main faces are disposed so as to be perpendicular to a substrate. The first main face is fixed to the substrate. The second main face is supported so as to be integrally and three-dimensionally displaced. The first and second main faces are provided each of which has a length larger in the direction of a substrate's main face than in the direction perpendicular to the substrate. At each capacitor, the first and second main faces are disposed so as to shift centroids of the first and second main face perpendicularly to the main face of the substrate. <P>COPYRIGHT: (C)2008,JPO&INPIT |
