| 摘要 |
<P>PROBLEM TO BE SOLVED: To expose a high-quality image of high picture quality which is less in fluctuation of areas of rectangles caused by fluctuation of line width upon forming an image of repeated rectangular patterns in image drawing by digital scanning exposure using a spatial modulation element such as a DMD (Digital Micromirror Device). <P>SOLUTION: The drawing is carried out by controlling a relative scanning direction of a substrate (a medium to be exposed) and a spatial modulation element to be coincident with the short side of the rectangle. <P>COPYRIGHT: (C)2008,JPO&INPIT |
