摘要 |
A SPICE(simulation program with integrated circuit emphasis) modeling method of an antistatic diode is provided to embody a diode with guaranteed electrical reliability which operates without an error even in a condition of electrostatic discharge of high current, by predicting a current voltage characteristic after a first break region. A reverse voltage(Vd) applied to a cathode of an antistatic diode and a distance(B) between an N+ active region and a P+ active region is detected. A current value(Id) is detected by using a mathematical formula with respect to a SPICE model including the reverse voltage and the distance. [mathematical formula]Id=a*Ln(Vd)+exp(Vd)+c wherein a factor is -.0.01051*B+0.09531, b factor is -2.908473-27*B+8.7254E-27, c factor is 0.02375*B-0.21939, and B is a distance between the N+ active region and the P+ active region. The current value(Id) detected by using the mathematical formula is compared with a measured current of the antistatic diode. |