| 摘要 |
PROBLEM TO BE SOLVED: To provide a peripheral edge inspecting apparatus capable of minutely observing an edge portion, without making the apparatus large-sized. SOLUTION: The apparatus comprises: a support member (rotary table 30) for supporting an object to be inspected (semiconductor wafer 10); an illuminating member (lamp 20, ring-light 27) for illuminating the peripheral edge (edge portion 11) of the object to be inspected; an observing member (CCD camera 21) for observing the peripheral edge of the object to be inspected; and a reflecting member (reflective mirror 22) for reflecting light which passes through an area near the peripheral edge, toward the observing member. COPYRIGHT: (C)2008,JPO&INPIT |
