| 摘要 |
PROBLEM TO BE SOLVED: To prevent degradation of reliability of an actuator due to temperature dependency. SOLUTION: The actuator according to the present embodiment includes a plurality of electrode sections electrically insulated each other and further has a driving electrode 25 for driving a movable section 23, and controls the magnitude of an electrostatic force working on the movable section 23 by selectively applying a driving voltage to a part of the plurality of electrode sections. COPYRIGHT: (C)2008,JPO&INPIT
|
