| 摘要 |
PROBLEM TO BE SOLVED: To provide a cassette-type substrate carrier that can transport the substrates among processing apparatuses in a vacuum state, as are, without making the contact the atmosphere, and realize automation and performance improvement in a flat panel display manufacturing process, and to provide a processing method that uses the substrate carrier. SOLUTION: A slide-type shutter plate 16 for sealing of the opening 11 is provided at a front face flange unit 12 of a cassette body 10, having an airtight structure for storing the substrate P and being sealed tightly by a tight contact means 17 of a magnet type. At an opening unit 6 of a processing system, a lock means for airtightly mounting the front-face flange unit 12 of the cassette body 10, a door pocket unit 20 for drawing a shutter plate 16, and an opening/closing means 21 of the shutter plate 16 are provided. While a vacuum state is being maintained, the substrate P which has been stored inside the cassette body 10, is carried among two or more processing apparatuses, and the shutter plate 16 is opened at each processing system and the substrate P is taken out with a robot hand and processed. COPYRIGHT: (C)2008,JPO&INPIT
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