| 摘要 |
<p>A fluid control device maintainable if there is a replacement space for its width without requiring a replacement space for its length even if a bar-like cartridge heater is used and accordingly capable of suppressing an increase in its installation area. A recessed part (2a) opening to the side is formed in a support member (2). A heater member (3) is detachably and fixedly inserted into the recessed part (2a) of the support member (2) from the side. The support member (2) is formed in a channel shape in cross section by stacking two plate-like members (21) and (22) on each other. The heat member (3) is inserted into the recessed part (2a) formed by the two plate-like members (21) and (22) and fixed with hexagon socket head cap screws (26). ® KIPO & WIPO 2008</p> |
